scia Systems GmbH
Machinery ManufacturingSaxony, Germany51-200 Employees
scia Systems GmbH designs and manufactures ion beam and plasma processing equipment used in the production of microelectronics, MEMS, and precision optical components. Its systems support both high-volume manufacture and research and development, offering flexible process configurations through modular vacuum chambers that can be combined into cluster or in-line solutions to meet customer requirements. Based in Chemnitz, Saxony, Germany, the company operates in the machinery manufacturing industry and serves customers through design, development, manufacturing and after-sales service delivered via a global network of sales and service partners. In September 2025, scia Systems announced a collaborative technical presentation with Hiden Analytical for Plasma4Production 2025 in Traunreut, Germany.