ibss Group, Inc.

Semiconductor ManufacturingUnited States2-10 Employees

ibss manufacturers GV10x DS Plasma Asher to remove hydrocarbon contamination from electron microscope chamber surfaces, detector windows and samples. The GV10x produces a virtual zero energy downstream plasma that ashes hydrocarbon deposits in electron and ion beam tools. Decontamination of HC deposits are accelerated by the long mean free path of atomic O species and abundant bright UV that without damage to samples. This low-pressure plasma cleaning process ashes gas phase Hydrocarbons, giving users the ability to run a short cleaning cycle to remove HC artifacts and return to analysis in minutes.

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