Vantage Technology Corporation

Semiconductor ManufacturingCalifornia, United States2-10 Employees

Vantage Technology Corporation is a new venture company providing the semiconductor industry with measurement tools to monitor the distribution of particle size in CMP slurry.

Our first product, SlurryScope, is an automated system designed for real-time particle examination...at point of use.  As slurry is delivered to the chamber, SlurryScope takes particle data in real-time.  The data is time stamped allowing it then to be correlated to the specific wafers processed. 

SlurryScope is aimed at preventing defects that are caused by large particles in the slurry and for characterizing the particle distribution delivered to each wafer.  It can be used to extend the life of slurry filters...improve the consistency of CMP results... and lower the cost of wafer processing.

SlurryScope eliminates the need for dilution and its associated errors, a currently used technique to “see through” the slurry.

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